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UH Nano Fab Schedule
05/19/2013 - 05/25/2013

View schedule:
April 2013
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May 2013
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June 2013
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30      
Sunday,
05/19/2013		 8:00am9:00am10:00am11:00am12:00pm1:00pm2:00pm3:00pm4:00pm5:00pm6:00pm
                      
ABM Mask Aligner                      
AFM                      
Annealing Oven (Left)                      
Annealing Oven (Right)                      
Desktop Sputtering System                      
E-beam Evaporator                      
E-beam litho / SEM
Focused Ion Beam                      
Ion Mill                      
JBX-5500 E-beam Writer                      
Kasper Mask Aligner                      
RIE 100                      
RIE 80 Plus                      
RIE ICP 180                      
RTP                      
Spinner                      
Thermal Evaporator - Not in Cleanroom - S356                      
UHV Sputtering                      

 

Monday,
05/20/2013		 8:00am9:00am10:00am11:00am12:00pm1:00pm2:00pm3:00pm4:00pm5:00pm6:00pm
                      
ABM Mask Aligner                     
AFM                      
Annealing Oven (Left)                      
Annealing Oven (Right)                      
Desktop Sputtering System                      
E-beam Evaporator             
E-beam litho / SEM
Focused Ion Beam                    
Ion Mill                      
JBX-5500 E-beam Writer
Kasper Mask Aligner                     
RIE 100                      
RIE 80 Plus                  
RIE ICP 180            
RTP                      
Spinner              
Thermal Evaporator - Not in Cleanroom - S356                      
UHV Sputtering                    

 

Tuesday,
05/21/2013		 8:00am9:00am10:00am11:00am12:00pm1:00pm2:00pm3:00pm4:00pm5:00pm6:00pm
                      
ABM Mask Aligner                     
AFM                      
Annealing Oven (Left)                      
Annealing Oven (Right)                      
Desktop Sputtering System                      
E-beam Evaporator                      
E-beam litho / SEM
Focused Ion Beam             
Ion Mill                      
JBX-5500 E-beam Writer
Kasper Mask Aligner                      
RIE 100                      
RIE 80 Plus                     
RIE ICP 180
RTP                      
Spinner                    
Thermal Evaporator - Not in Cleanroom - S356                      
UHV Sputtering          

 

Wednesday,
05/22/2013		 8:00am9:00am10:00am11:00am12:00pm1:00pm2:00pm3:00pm4:00pm5:00pm6:00pm
                      
ABM Mask Aligner                     
AFM                
Annealing Oven (Left)                      
Annealing Oven (Right)                      
Desktop Sputtering System                      
E-beam Evaporator                   
E-beam litho / SEM
Focused Ion Beam         
Ion Mill                      
JBX-5500 E-beam Writer
Kasper Mask Aligner                      
RIE 100                      
RIE 80 Plus                   
RIE ICP 180              
RTP                      
Spinner                  
Thermal Evaporator - Not in Cleanroom - S356                      
UHV Sputtering                  

 

Thursday,
05/23/2013		 8:00am9:00am10:00am11:00am12:00pm1:00pm2:00pm3:00pm4:00pm5:00pm6:00pm
                      
ABM Mask Aligner                    
AFM               
Annealing Oven (Left)                      
Annealing Oven (Right)                      
Desktop Sputtering System                      
E-beam Evaporator            
E-beam litho / SEM
Focused Ion Beam     
Ion Mill                  
JBX-5500 E-beam Writer
Kasper Mask Aligner                      
RIE 100                      
RIE 80 Plus                  
RIE ICP 180           
RTP                      
Spinner                 
Thermal Evaporator - Not in Cleanroom - S356                      
UHV Sputtering                  

 

Friday,
05/24/2013		 8:00am9:00am10:00am11:00am12:00pm1:00pm2:00pm3:00pm4:00pm5:00pm6:00pm
                      
ABM Mask Aligner                      
AFM                   
Annealing Oven (Left)                      
Annealing Oven (Right)                      
Desktop Sputtering System                     
E-beam Evaporator             
E-beam litho / SEM
Focused Ion Beam              
Ion Mill                    
JBX-5500 E-beam Writer
Kasper Mask Aligner                      
RIE 100                      
RIE 80 Plus                  
RIE ICP 180                  
RTP                      
Spinner               
Thermal Evaporator - Not in Cleanroom - S356                      
UHV Sputtering                      

 

Saturday,
05/25/2013		 8:00am9:00am10:00am11:00am12:00pm1:00pm2:00pm3:00pm4:00pm5:00pm6:00pm
                      
ABM Mask Aligner                      
AFM                      
Annealing Oven (Left)                      
Annealing Oven (Right)                      
Desktop Sputtering System                      
E-beam Evaporator                      
E-beam litho / SEM
Focused Ion Beam                
Ion Mill                      
JBX-5500 E-beam Writer                      
Kasper Mask Aligner                      
RIE 100                      
RIE 80 Plus                      
RIE ICP 180                      
RTP                      
Spinner                      
Thermal Evaporator - Not in Cleanroom - S356                      
UHV Sputtering                      

 

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